Lack of hardening effect in TiN/NbN multilayers

Materials Research Society Symposium - Proceedings

Volumn 673, Issue , 2001, Pages

  Molina Aldareguia, Jon M ^a   Lloyd, Stephen J ^a   Barber, Zoe H ^a   Clegg, William J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL GROWTH; DISLOCATIONS (CRYSTALS); HARDNESS; INDENTATION; MAGNESIA; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; SINGLE CRYSTALS; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

NANOINDENTATION HARDNESS; NIOBIUM NITRIDE; ULTRAHIGH VACUUM REACTIVE MAGNETRON SPUTTERING;

MULTILAYERS;

EID: 0035559556     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-673-p3.3     Document Type: Conference Paper

References (11)