Internal matrix structure of low-κ mesoporous silica and its relation to mechanical properties

Journal of Non-Crystalline Solids

Volumn 349, Issue 1-3, 2004, Pages 189-199

  Saxena, R ^a   Rodriguez, O ^a   Cho, W ^a   Gill, W N ^a   Plawsky, J L ^a   Baklanov, M R ^b   Mogilnikov, K P ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELASTIC MODULI; ELLIPSOMETRY; FINITE ELEMENT METHOD; MESOPOROUS MATERIALS; PORE SIZE; SINTERING;

ELLIPSOMETRIC POROSIMETRY (EP); MESOPOROUS DIELECTRICS; SOL-GEL PROCESS; THERMAL PROPERTIES;

SILICA;

EID: 9644284432     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.08.185     Document Type: Conference Paper

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