Microfabrication using silicon mold inserts and hot embossing

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1996, Pages 67-71

  Lin, Liwei ^a   Chiu, Chun Jung ^a   Bacher, Walter ^a   Heckele, Mathias ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; OPTICAL INSTRUMENT LENSES; PLASTIC FILMS; PLASTICS; SEMICONDUCTING SILICON; SILICON WAFERS; THREE DIMENSIONAL;

ANISOTROPIC SILICON ETCHING PROCESS; FEASIBILITY; MICROFABRICATION; MICROLENSES; SILICON MOLD INSERT AND MICROHOT EMBOSSING PROCESS;

MICROELECTRONIC PROCESSING;

EID: 0030421663     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)