SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 281-286

Utilizing bipolar pulsed PACVD for the deposition of alumina hard coatings

(5) Fink, M a Locker C b Laimer, J a Mitterer, C b Stori H a

a VIENNA UNIVERSITY OF TECHNOLOGY (Austria)

b Institut fur Metallkunde und Werkstoffprufung (Austria)

Author keywords

Aluminium oxide; Direct current (DC); PACVD; Pulsed

Indexed keywords

ALUMINA; AUSTENITE; BORON; ELECTRODES; INDENTATION; MICROHARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON; STEEL; SUBSTRATES; SURFACE TREATMENT; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

BIPOLAR VOLTAGE PULSES; CRYSTALLINE MODIFICATIONS; HARD COATINGS; MICROINDENTATION;

COATINGS;

COATING;

EID: 14644422186 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.08.044 Document Type: Article

Times cited : (8)

References (15)

1
- 0005329287
- M. Kornmann H. Schachner R. Funk B. Lux J. Cryst. Growth 28 1975 259
- (1975) J. Cryst. Growth , vol.28 , pp. 259
- Kornmann, M.¹ Schachner, H.² Funk, R.³ Lux, B.⁴

2
- 0032047852
- H.G. Prengel W.R. Pfouts A.T. Santhanam Surf. Coat. Technol. 102 1998 183
- (1998) Surf. Coat. Technol. , vol.102 , pp. 183
- Prengel, H.G.¹ Pfouts, W.R.² Santhanam, A.T.³

3
- 0030419183
- O. Zywitzki G. Hoetzsch Surf. Coat. Technol. 86-87 1996 640
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 640
- Zywitzki, O.¹ Hoetzsch, G.²

4
- 0343603227
- J.M. Schneider W.D. Sproul A. Matthews Surf. Coat. Technol. 94-95 1997 179
- (1997) Surf. Coat. Technol. , vol.94-95 , pp. 179
- Schneider, J.M.¹ Sproul, W.D.² Matthews, A.³

5
- 0026871494
- J. Patscheider S. Veprek Plasma Chem. Plasma Process. 12 1992 129
- (1992) Plasma Chem. Plasma Process. , vol.12 , pp. 129
- Patscheider, J.¹ Veprek, S.²

6
- 0031094194
- C.H. Lin H.L. Wang M.H. Hon Surf. Coat. Technol. 90 1997 102
- (1997) Surf. Coat. Technol. , vol.90 , pp. 102
- Lin, C.H.¹ Wang, H.L.² Hon, M.H.³

7
- 0026018437
- U. König R. Tabersky H. van den Berg Surf. Coat. Technol. 50 1991 57
- (1991) Surf. Coat. Technol. , vol.50 , pp. 57
- König, U.¹ Tabersky, R.² van den Berg, H.³

8
- 0030535949
- R. Tabersky H. van den Berg U. König Int. J. Refract. Met. Hard Mater. 14 1996 79
- (1996) Int. J. Refract. Met. Hard Mater. , vol.14 , pp. 79
- Tabersky, R.¹ van den Berg, H.² König, U.³

9
- 0032182936
- Ch. Täschner B. Ljungberg V. Alfredsson I. Endler A. Leonhardt Surf. Coat. Technol. 108-109 1998 257
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 257
- Täschner, Ch.¹ Ljungberg, B.² Alfredsson, V.³ Endler, I.⁴ Leonhardt, A.⁵

10
- 0042202729
- Ch. Täschner B. Ljungberg I. Endler A. Leonhardt Surf. Coat. Technol. 116-119 1999 891
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 891
- Täschner, Ch.¹ Ljungberg, B.² Endler, I.³ Leonhardt, A.⁴

11
- 17444450431
- O. Kyrylov R. Cremer D. Neuschütz Surf. Coat. Technol. 163-164 2003 203
- (2003) Surf. Coat. Technol. , vol.163-164 , pp. 203
- Kyrylov, O.¹ Cremer, R.² Neuschütz, D.³

12
- 14644431904
- Rübig, Wels, Austria
- Rübig, Wels, Austria; http://www.rubig.com/.

13
- 0034156371
- T.A. Beer J. Laimer H. Störi J. Vac. Sci. Technol., A, Vac. Surf. Films 18 2000 423
- (2000) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.18 , pp. 423
- Beer, T.A.¹ Laimer, J.² Störi, H.³

14
- 0042357330
- J. Laimer M. Fink T.A. Beer H. Störi Surf. Coat. Technol. 174-175 2003 118
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 118
- Laimer, J.¹ Fink, M.² Beer, T.A.³ Störi, H.⁴

15
- 0034011674
- C. Mitterer F. Holler F. Üstel D. Heim Surf. Coat. Technol. 125 2000 233
- (2000) Surf. Coat. Technol. , vol.125 , pp. 233
- Mitterer, C.¹ Holler, F.² Üstel, F.³ Heim, D.⁴

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