Deposition of hard crystalline Al2O3 coatings by bipolar pulsed d.c. PACVD

Surface and Coatings Technology

Volumn 108-109, Issue , 1998, Pages 257-264

  Taschner Ch ^a   Ljungberg, B ^b   Alfredsson, V ^c   Endler, I ^a   Leonhardt, A ^a  

^a IFW DRESDEN   (Germany)

^b AB Sandvik Coromant   (Sweden)

^c LUND UNIVERSITY   (Sweden)

Author keywords

Al2O3; PACVD

Indexed keywords

ALUMINA; COBALT COMPOUNDS; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; MICROHARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STEEL; SUBSTRATES; SURFACE ROUGHNESS; TRANSPARENCY; TUNGSTEN CARBIDE; WEAR RESISTANCE;

CEMENTED CARBIDES; PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION (PACVD);

CERAMIC COATINGS;

EID: 0032182936     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00561-1     Document Type: Article

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