Effect of microfabrication processes on surface roughness parameters of silicon surfaces

Surface and Coatings Technology

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 581-587

  Chandrasekaran, Sharath ^a   Sundararajan, Sriram ^a  

^a Iowa State University of Science and Technology   (United States)

Author keywords

AFM; Etching; Friction; MEMS; Silicon; Surface micromachining; Surface roughness

Indexed keywords

FABRICATION; FORMAL LOGIC; FRICTION; MATHEMATICAL MODELS; SILICON; TRIBOLOGY;

AUTOCORRELATION LENGTH (ACL); MICRO/NANOSCALE SYSTEMS; MICROFABRICATION PROCESSES; TRIBOLOGICAL BEHAVIOR;

SURFACE ROUGHNESS;

COATING; ETCHING; MODEL; SURFACE ROUGHNESS; TRIBOLOGY;

EID: 14644403698     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.07.015     Document Type: Article

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