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Thin Solid Films

Volumn 476, Issue 1, 2005, Pages 46-50

The preparation of nanoporous siloxane films using saccharide derivatives as new porogen

(3) Yim, Jin Heong a Jeong, Hyun Dam a Sun Pu, Lyong a

a Samsung Adv Institiue of Technology (South Korea)

Author keywords

Dielectric properties; Insulators; Nanostructures; Polymers

Indexed keywords

CAPACITANCE; DECOMPOSITION; DERIVATIVES; DIELECTRIC PROPERTIES; INTEGRATED CIRCUITS; MOLECULAR WEIGHT; POLYMERS; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

INSULATORS; NANOPOROUS SILOXANE; POROGEN; SILSESQUIOXANE (SSQ);

NANOSTRUCTURED MATERIALS;

EID: 13844319455 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.09.005 Document Type: Article

Times cited : (10)

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