The characterization and preparation of porous low dielectric films using various cyclodextrins as template materials

Materials Research Society Symposium - Proceedings

Volumn 766, Issue , 2003, Pages 315-320

  Yim, Jin Heong ^a   Kim, Jung Bae ^a   Jeong, Hyun Dam ^a   Lyu, Yi Yeoul ^a   Mah, Sang Kook ^a   Hyeon Lee, Jingyu ^a   Lee, Kwang Hee ^a   Chang, Seok ^a   Pu, Lyong Sun ^a,c   Hu, Y F ^b   Sun, J N ^b   Gidley, D W ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b UNIVERSITY OF MICHIGAN   (United States)

^c Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; DERIVATIVES; ELASTIC MODULI; FILM PREPARATION; HARDNESS; NANOSTRUCTURED MATERIALS; PERMITTIVITY; PORE SIZE; POROSITY; POROUS MATERIALS;

CYCLODEXTRIN; POROUS LOW DIELECTRIC FILM;

THIN FILMS;

EID: 0348199042     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-766-e8.10     Document Type: Conference Paper

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