Oriented growth of thin films of samarium oxide by MOCVD

Bulletin of Materials Science

Volumn 28, Issue 1, 2005, Pages 49-54

  Shalini, K ^a   Shivashankar, S A ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Gate dielectric; MOCVD; Samarium oxide; Thin films; diketonate

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; DIELECTRIC MATERIALS; DIFFERENTIAL THERMAL ANALYSIS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH TEMPERATURE EFFECTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOS DEVICES; OPACITY; QUARTZ; SAMARIUM COMPOUNDS; SCANNING ELECTRON MICROSCOPY; THERMOGRAVIMETRIC ANALYSIS; X RAY DIFFRACTION ANALYSIS;

GATE DIELECTRICS; MOS CIRCUITS; SAMARIUM OXIDE; Β-DIKETONATE;

THIN FILMS;

EID: 13844281283     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02711172     Document Type: Review

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