Etch-pits of GaN films with different etching methods

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 25, Issue 11, 2004, Pages 1376-1380

  Lu, Min ^a   Chang, Xin ^a   Fang, Huizhi ^a   Yang, Zhijian ^a   Yang, Hua ^a   Li, Zilan ^a   Ren, Qian ^a   Zhang, Guoyi ^a   Zhang, Bei ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

EPD; GaN; TD

Indexed keywords

ETCHING; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

ETCH PITS; GALLIUM NITRIDE FILMS; PURE EDGE; PURE SCREW; THREADING DISLOCATIONS; VAPOR ETCHING; WET ETCHING;

GALLIUM NITRIDE;

EID: 13644278125     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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