Etch pits and threading dislocations in GaN films grown by metal-organic chemical vapour deposition

Chinese Physics Letters

Volumn 20, Issue 3, 2003, Pages 398-400

  Lu, Min ^a   Chang, Xin ^b   Li, Zi Lan ^a   Yang, Zhi Jian ^a   Zhang, Guo Yi ^a   Zhang, Bei ^a  

^a PEKING UNIVERSITY   (China)

^b PEKING UNIVERSITY HEALTH SCIENCE CENTER   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; ETCHING; GALLIUM NITRIDE; III-V SEMICONDUCTORS; INDUSTRIAL CHEMICALS; LATTICE MISMATCH; ORGANIC CHEMICALS; ORGANOMETALLICS; POTASSIUM HYDROXIDE; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR QUANTUM WELLS; THERMAL EXPANSION; TRANSMISSION ELECTRON MICROSCOPY;

ACID SOLUTIONS; ETCH PITS; GAN FILM; HIGH QUALITY; METAL-ORGANIC CHEMICAL VAPOUR DEPOSITIONS; MIXED ACIDS; SAPPHIRE SUBSTRATES; THREADING DISLOCATION; TRANSMISSION ELECTRON; VAPOR DEPOSITION SYSTEMS;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 0037349509     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/20/3/324     Document Type: Article

References (21)

1. Akasaki I 1998 J. Crystal Growth 195 248
2. Akasaki I 1999 J. Crystal Growth 198/199 885
3. Iwaya M et al 1998 Jpn. J. Appl. Phys. 37 L316
4. Northrup J E, Romano L T and Neugebauer J 1999 Appl. Phys. Lett. 74 2319
5. Hino T, Tomiya S, Miyajima T, Yanashima K, Hashimoto S and Ikeda M 2000 Appl. Phys. Lett. 76 3421
6. Ponce F. A, Cherns D, Young W T and Steeds J W 1996 Appl. Phys. Lett. 69 770
7. Tomiya S et al 2000 Appl. Phys. Lett. 77 636
8. Qian W et al 1995 Appl. Phys. Lett. 88 1252
9. Chen Z Z et al 2002 Chin. Phys. Lett. 19 375
10. Hong S K, Kim B J, Park H S, Yoom S Y and Kim T I 1998 J. Crystal Growth 191 275
11. Hong S K, Yao T, Kim B J, Yoom S Y and Kim T I 2000 Appl. Phys. Lett. 77 82
12. Nam O H et al 1997 Appl. Phys. Lett. 71 2638
13. Tu K N, Mayer J W and Feldman L C 1992 Electronic Thin Film Science (New York: Macmillan) ch 7, p 191
14. Kisielowski C et al 1996 Phys. Rev. B 54 17745
15. Hirth J P and Lothe J 1982 Theory of Dislocations (New York: Wiley-Interscience) ch 3, pp 68-86
16. Hirsch P et al 1965 Electron Microscopy of Thin Crystals (London: Butterworths) p 122
17. Hren J J, Goldstein J I and Joy D C 1979 Introduction to Analytical Electron Microscopy (New York: Plenum) ch 11, pp 318-19
18. Marchand H et al 1998 Mater. Res. Soc. Internet J. Nitride Semicond. Res. 3 3
19. Kozawa T, Kachi T, Kano H, Nagase H, Koide N and Manabe K 1995 J. Appl. Phys. 77 4389
20. Zhang G Y, Liu H D and Wang S M 1995 J. Basic Sci. Eng. 3 4
21. Wu X H, Brown L M, Kapolnek D, Keller S, Keller B, Den-Baars S P and Speck J S 1996 J. Appl. Phys. 80 3228