A new FIB fabrication method for micropillar specimens for three-dimensional observation using scanning transmission electron microscopy

Journal of Electron Microscopy

Volumn 53, Issue 5, 2004, Pages 479-483

  Fukuda, Muneyuki ^a   Tomimatsu, Satoshi ^a   Nakamura, Kuniyasu ^a   Koguchi, Masanari ^a   Shichi, Hiroyasu ^a   Umemura, Kaoru ^b  

^a HITACHI LTD   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

Damaged layer; FIB; Micromanipulation; STEM; TEM specimen; Three dimensional observation

Indexed keywords

ARTICLE; LABORATORY DIAGNOSIS; METHODOLOGY; SCANNING TRANSMISSION ELECTRON MICROSCOPY; THREE DIMENSIONAL IMAGING;

IMAGING, THREE-DIMENSIONAL; MICROSCOPY, ELECTRON, SCANNING TRANSMISSION; SPECIMEN HANDLING;

ASPECT RATIO; FABRICATION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; SCANNING ELECTRON MICROSCOPY;

DAMAGED LAYERS; FABRICATION METHOD; FIB; HIGH ASPECT RATIO; MICRO MANIPULATION; MICRO PILLARS; SCANNING TRANSMISSION ELECTRON MICROSCOPY; STEM; TEM SPECIMEN; THREE-DIMENSIONAL OBSERVATIONS;

ION BEAMS;

EID: 13444251530     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/dfh059     Document Type: Article

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