A newly developed FIB system for TEM specimen preparation

Microscopy and Microanalysis

Volumn 8, Issue SUPPL. 2, 2002, Pages 48-49

  Kamino, Takeo ^a   Yaguchi, T ^a   Kuroda, Y ^a   Hashimoto, T ^b   Ohnishi, T ^b   Ishitani, T ^b   Umemura, K ^a   Asayama, K ^a  

^a HITACHI LTD   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036409164     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/s1431927602101565     Document Type: Conference Paper

References (5)

1. T.Ishitani, et al., J. Electron Microsc.43, 5 (1994)322-326
2. T.Kamino, et al., Proc. Microsc. and Microanal. 6, Supp.12 (2000) 510-511
3. K.Umemura, et al., Electron Microscopy, 34, Supp. 1 (1999) 510-511
4. thInt.Symp. for Testing and Failure Analysis (1999) 449-503
5. T.Yaguchi, et al., Proc. Microsc. and Microanal.7, Supp. 2 (2001) 938-939