Three-dimensional STEM for observing nanostructures

Journal of Electron Microscopy

Volumn 50, Issue 3, 2001, Pages 235-241

  Koguchi, M ^a   Kakibayashi, H ^a   Tsuneta, R ^a   Yamaoka, M ^a   Niino, T ^b   Tanaka, N ^c   Kase, K ^d   Iwaki, M ^d  

^a HITACHI LTD   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c NAGOYA UNIVERSITY   (Japan)

^d INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

3D EDX; 3D observation; Cu metallization; Cylindrical specimen; Double sphrerical fulcra; Eucentric specimen stage; FIB; HAADF STEM; ZnO particle

Indexed keywords

ARTICLE;

COPPER; II-VI SEMICONDUCTORS; ION BEAMS; MAGNETIC SEMICONDUCTORS; SEMICONDUCTOR DEVICES; TRANSMISSION ELECTRON MICROSCOPY; WIDE BAND GAP SEMICONDUCTORS; ZINC OXIDE;

3D-EDX; 3D-OBSERVATION; CU METALLIZATION; CYLINDRICAL SPECIMENS; DOUBLE SPHERICAL FULCRA; EUCENTRIC SPECIMEN STAGE; FIB; HAADF-STEM; SCANNING TRANSMISSION ELECTRON MICROSCOPES; ZNO PARTICLES;

NANOSTRUCTURES;

EID: 0034935649     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/50.3.235     Document Type: Article

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