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Thin Solid Films

Volumn 408, Issue 1-2, 2002, Pages 160-168

Young's modulus of (Ti,Si)N films by surface acoustic waves and indentation techniques

(6) Vaz, F a Carvalho, S a Rebouta, L a Silva, M Z a Paul A b Schneider, D c

a UNIVERSITY OF MINHO (Portugal)

b INSTITUTO TECNOLÓGICO E NUCLEAR (Portugal)

c FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS (Germany)

Author keywords

Elastic properties; Nitrides; Sputtering; Structural properties

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; COATINGS; CRYSTALLINE MATERIALS; ELASTIC MODULI; FILM PREPARATION; INDENTATION; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; PHASE COMPOSITION; SEGREGATION (METALLOGRAPHY); TITANIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

NANOCOMPOSITE FILMS; SURFACE ACOUSTIC WAVES (SAW);

THIN FILMS;

EID: 0037012531 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)00132-3 Document Type: Article

Times cited : (39)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.