Recent advances in vacuum arc ion sources

Surface and Coatings Technology

Volumn 84, Issue 1-3, 1996, Pages 550-556

  Brown, I G ^a   Anders, A ^a   Anders, S ^a   Dickinson, M R ^a   MacGill, R A ^a   Oks, E M ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

Author keywords

Ion implantation; Ion source; Metal ions; Surface modification; Vacuum arc

Indexed keywords

ELECTRODES; ION BEAMS; ION IMPLANTATION; METALLURGY; METALS; SURFACE TREATMENT; VACUUM;

BEAM FORMATION ELECTRODES; CHARGE STATES; METAL IONS; VACUUM ARC;

ION SOURCES;

EID: 0030271129     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(95)02833-1     Document Type: Article

References (40)

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