Pulse-modulated plasma-enhanced chemical vapor deposition of SiO2 coatings from octamethylcyclotetrasiloxane

Surface and Coatings Technology

Volumn 177-178, Issue , 2004, Pages 394-398

  Qi, Yu ^a   Mantei, T D ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

Author keywords

Octamethylcyclotetrasiloxane; Plasma enhanced chemical vapor deposition; Pulse modulation

Indexed keywords

FREQUENCIES; MICROWAVES; MILITARY ELECTRONIC COUNTERMEASURES; PULSE MODULATION; SILICA;

DEPOSITION GROWTH RATES; PULSE PLASMA DEPOSITION;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

COATING;

EID: 1342268138     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.09.014     Document Type: Article

References (25)

1. Wrobel A.M. Wertheimer M.R. d'Agostino R. Plasma Deposition, Treatment and Etching of Polymers 1990 Academic Press San Diego, CA
2. Thiel J.A. Brace J.G. Knoll R.W. J. Vac. Sci. Technol. A 12 1994 1365
3. Sano K. Hayashi S. Wickramanayaka S. Hatanaka Y. Thin Solid Films 281 1996 397
4. Delsol R. Reymaud P. Segui Y. Latreche M. Agres L. Mage L. Thin Solid Films 289 1996 170
5. Deshmukh S.C. Aydil E.S. J. Vac. Sci. Technol. A 13 1995 2355
6. Inoue Y. Takai O. Thin Solid Films 341 1999 47
7. Fujii T. Hiramatsu M. Nawata M. Thin Solid Films 343 1999 457
8. Vallee C. Rhallabi A. Granier A. Goullet A. Turban G. J. Vac. Sci. Technol. A 18 2000 2728
9. Aumaille K. Vallee C. Granier A. Goullet A. Turban G. Thin Solid Films 359 2000 188
10. Lin C.-T. Li F. Mantei T.D. J. Vac. Sci. Technol. A 17 1999 3
11. C.-T. Lin, Plasma enhanced chemical vapor deposition of functional coating using experimental design methodology, Ph.D. Dissertation, 1999
12. Y. Qi, Z.G. Xiao, T.D. Mantei, to appear in J. Vac. Sci. Technol. A
13. Madan A. Morrison S. Sol. Energy Mater. Solar Cells 55 1998 127-139
14. Hiramatsu K. Ohnishi H. Takahama T. Yamanishi K. J. Vac. Sci. Technol. A 14 1996 3
15. McCurdy P.R. Truitt J.M. Fisher E.R. J. Vac. Sci. Technol. A 17 1999 2475
16. Khachan J. Gradner D. J. Appl. Phys. 86 2001 11
17. K.K. Gleason, S.J.H. Limb, E.F. Gleason, H.H.H. Sawin, U.S. Patent 5,888,591, 1999
18. Labelle C.B. Gleason K.K. J. Appl. Polym. Sci. 74 1999 2439
19. Limb S.J. Edell D.J. Gleason E.F. Gleason K.K. J. Appl. Polym. Sci. 67 1998 1489
20. Limb S.J. Edell D.J. Gleason E.F. J. Vac. Sci. Technol. A 15 1997 4
21. Limb S.J. Labelle C.B. Gleason K.K. Edell D.J. Gleason E.F. Appl. Phys. Lett. 68 1996 20
22. Cruden B.A. Gleason K.K. Sawin H.H. J. Appl. Phys. 89 2001 2
23. Lax B. Allis W.P. Brown S.C. J. Appl. Phys. 21 1950 1297
24. Limpaecher R. Mackenzie K.R. Rev. Sci. Instrum. 44 1973 726
25. Box G.E.P. Hunter W.G. Hunter J.S. Statistics for Experimenters 1978 John Wiley and Sons New York