High deposition rate amorphous and polycrystalline silicon materials using the pulsed plasma and "Hot-Wire" CVD techniques

Solar Energy Materials and Solar Cells

Volumn 55, Issue 1-2, 1998, Pages 127-139

  Madan, Arun ^a   Morrison, Scott ^a  

^a MVSystems Inc   (United States)

Author keywords

Hot wire; Pulsed plasma; Silicon materials

Indexed keywords

AMORPHOUS SILICON; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS;

PULSED PLASMAS;

SOLAR CELLS;

EID: 0032165260     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(98)00053-1     Document Type: Article

References (19)

1. A. Madan, M. Shaw, The Physics and Applications of Amorphous Semiconductors, Academic Press, New York, 1988.
2. G. Bruno, P. Capezzuto, A. Madan (Eds.), Plasma Deposition of Amorphous Silicon Based Materials, Academic Press, New York, 1995.
3. Amorphous silicon technology-1995, MRS Proc., vol. 377, 1995.
4. P.G. LeComber, A. Madan, W.E. Spear, in: P.G. LeComber, J. Mort (Eds.), Electronic and Structural Properties of Amorphous Semiconductors, Academic Press, New York, 1973; P.G. LeComber, A. Madan, W.E. Spear, J. Non-Cryst. Solids 11 (1972) 219. W.E. Spear, P.G. LeComber, J. Non-Cryst. Solids 8-10 (1972) 727. A. Madan, Ph.D. Thesis, University of Dundee, Scotland 1973; W.E. Spear, R.J. Loveland, A. Al-Sharbatyj, J. Non-Cryst. Solids 15 (1974) 410; A. Madan, P.G. LeComber, W.E. Spear, J. Non-Cryst. Solids 20 (1976) 239; W.E. Spear, P.G. LeComber, Phil. Mag. 33 (1976) 935.
5. P.G. LeComber, A. Madan, W.E. Spear, in: P.G. LeComber, J. Mort (Eds.), Electronic and Structural Properties of Amorphous Semiconductors, Academic Press, New York, 1973; P.G. LeComber, A. Madan, W.E. Spear, J. Non-Cryst. Solids 11 (1972) 219. W.E. Spear, P.G. LeComber, J. Non-Cryst. Solids 8-10 (1972) 727. A. Madan, Ph.D. Thesis, University of Dundee, Scotland 1973; W.E. Spear, R.J. Loveland, A. Al-Sharbatyj, J. Non-Cryst. Solids 15 (1974) 410; A. Madan, P.G. LeComber, W.E. Spear, J. Non-Cryst. Solids 20 (1976) 239; W.E. Spear, P.G. LeComber, Phil. Mag. 33 (1976) 935.
6. P.G. LeComber, A. Madan, W.E. Spear, in: P.G. LeComber, J. Mort (Eds.), Electronic and Structural Properties of Amorphous Semiconductors, Academic Press, New York, 1973; P.G. LeComber, A. Madan, W.E. Spear, J. Non-Cryst. Solids 11 (1972) 219. W.E. Spear, P.G. LeComber, J. Non-Cryst. Solids 8-10 (1972) 727. A. Madan, Ph.D. Thesis, University of Dundee, Scotland 1973; W.E. Spear, R.J. Loveland, A. Al-Sharbatyj, J. Non-Cryst. Solids 15 (1974) 410; A. Madan, P.G. LeComber, W.E. Spear, J. Non-Cryst. Solids 20 (1976) 239; W.E. Spear, P.G. LeComber, Phil. Mag. 33 (1976) 935.
7. P.G. LeComber, A. Madan, W.E. Spear, in: P.G. LeComber, J. Mort (Eds.), Electronic and Structural Properties of Amorphous Semiconductors, Academic Press, New York, 1973; P.G. LeComber, A. Madan, W.E. Spear, J. Non-Cryst. Solids 11 (1972) 219. W.E. Spear, P.G. LeComber, J. Non-Cryst. Solids 8-10 (1972) 727. A. Madan, Ph.D. Thesis, University of Dundee, Scotland 1973; W.E. Spear, R.J. Loveland, A. Al-Sharbatyj, J. Non-Cryst. Solids 15 (1974) 410; A. Madan, P.G. LeComber, W.E. Spear, J. Non-Cryst. Solids 20 (1976) 239; W.E. Spear, P.G. LeComber, Phil. Mag. 33 (1976) 935.
8. P.G. LeComber, A. Madan, W.E. Spear, in: P.G. LeComber, J. Mort (Eds.), Electronic and Structural Properties of Amorphous Semiconductors, Academic Press, New York, 1973; P.G. LeComber, A. Madan, W.E. Spear, J. Non-Cryst. Solids 11 (1972) 219. W.E. Spear, P.G. LeComber, J. Non-Cryst. Solids 8-10 (1972) 727. A. Madan, Ph.D. Thesis, University of Dundee, Scotland 1973; W.E. Spear, R.J. Loveland, A. Al-Sharbatyj, J. Non-Cryst. Solids 15 (1974) 410; A. Madan, P.G. LeComber, W.E. Spear, J. Non-Cryst. Solids 20 (1976) 239; W.E. Spear, P.G. LeComber, Phil. Mag. 33 (1976) 935.
9. P.G. LeComber, A. Madan, W.E. Spear, in: P.G. LeComber, J. Mort (Eds.), Electronic and Structural Properties of Amorphous Semiconductors, Academic Press, New York, 1973; P.G. LeComber, A. Madan, W.E. Spear, J. Non-Cryst. Solids 11 (1972) 219. W.E. Spear, P.G. LeComber, J. Non-Cryst. Solids 8-10 (1972) 727. A. Madan, Ph.D. Thesis, University of Dundee, Scotland 1973; W.E. Spear, R.J. Loveland, A. Al-Sharbatyj, J. Non-Cryst. Solids 15 (1974) 410; A. Madan, P.G. LeComber, W.E. Spear, J. Non-Cryst. Solids 20 (1976) 239; W.E. Spear, P.G. LeComber, Phil. Mag. 33 (1976) 935.
10. P.G. LeComber, A. Madan, W.E. Spear, in: P.G. LeComber, J. Mort (Eds.), Electronic and Structural Properties of Amorphous Semiconductors, Academic Press, New York, 1973; P.G. LeComber, A. Madan, W.E. Spear, J. Non-Cryst. Solids 11 (1972) 219. W.E. Spear, P.G. LeComber, J. Non-Cryst. Solids 8-10 (1972) 727. A. Madan, Ph.D. Thesis, University of Dundee, Scotland 1973; W.E. Spear, R.J. Loveland, A. Al-Sharbatyj, J. Non-Cryst. Solids 15 (1974) 410; A. Madan, P.G. LeComber, W.E. Spear, J. Non-Cryst. Solids 20 (1976) 239; W.E. Spear, P.G. LeComber, Phil. Mag. 33 (1976) 935.
11. H. Curtins, N. Wyrsch, A.V. Shah, Electron. Lett. 23 (1987) 228.
12. J. Yang, A. Banerjee, S. Guha, Appl. Phys. Lett. 70 (1997) 2975.
13. D. Fisher, S. Dubail, J. Anna Selven, N. Vaucher, R. Platz, Ch. Hof, U. Kroll, J. Meier, P. Torres, H. Keppner, N. Wyrch, M. Goetz, A. Shah, Proc. 25th IEEE Photovoltaic Conf., Washington, DC, 1996, p. 1053.
14. J.L. Overzt, J.T. Verleyen, Appl. Phys. Lett. 59 (1991) 2091.
15. H. Kirimura, H. Maeda, H. Murakami, T. Nakahigashi, S. Ohtani, T. Tabata, T. Hayashi, M. Kobayashi, Y. Matsuda, N. Nakmura, H. Kuwahara, Jpn. J. Appl. Phys. 33 (1994) 52.
16. H. Matsumura, Jpn. J. Appl. Phys. B 8 (1991) L1522.
17. J. Puigdollers, J. Bertomeu, J. Cifre, J. Andreu, J.C. Delgado, MRS Proc. vol. 377, 1995, p. 63.
18. A.R. Middya, A. Lloret, J. Perrin, J. Huc, J.L. Monecl, J.Y. Parey, G. Rose, MRS Proc., vol. 377, 1995, p. 119.
19. J. Cifre, J. Bertomou, J. Puigdollers, M.C. Polo, J. Andeau, A. Llloret, Appl. Phys. A 59 (1994) 645.