Effects of growth conditions on the emission properties of ZnO films prepared on Si(100) by rf magnetron sputtering

Journal of Physics D: Applied Physics

Volumn 36, Issue 16, 2003, Pages 2017-2020

  Jeong, Sang Hun ^a   Kim, Jae Keun ^a   Lee, Byung Teak ^a  

^a Chonnam National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; EXCITONS; FILM GROWTH; LIGHT EMISSION; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE; SEMICONDUCTING SILICON; SINTERING; STOICHIOMETRY; SUBSTRATES; ZINC OXIDE;

MICRO-CRYSTALLITES; RADIO FREQUENCY MAGNETRON SPUTTERING; ZINC OXIDE FILM;

SEMICONDUCTING FILMS;

EID: 0042823563     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/16/316     Document Type: Article

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