A Theoretical Evaluation of Hydrodynamic and Brush Contact Effects on Particle Removal during Brush Scrubbing

Journal of the Electrochemical Society

Volumn 150, Issue 10, 2003, Pages

  Burdick, G M ^a   Berman, N S ^a   Beaudoin, S P ^b  

^a Arizona State University   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; HYDRODYNAMICS; KINETIC THEORY; PARTICLES (PARTICULATE MATTER); REYNOLDS NUMBER; SEMICONDUCTOR DEVICE MANUFACTURE;

WAFER CLEANING;

CLEANING;

EID: 0142084834     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1605422     Document Type: Article

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