Numerical and experimental study of an out-of-plane prealigned refractive microlens fabricated using ultraviolet lithography method

Optical Engineering

Volumn 43, Issue 12, 2004, Pages 3096-3103

  Yang, Ren ^a   Wang, Wanjun ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

Free space optics; Integrated optical system; Out of plane microlens; Quasi parabolic surface; Tilted lithography

Indexed keywords

COMPUTER SIMULATION; INTEGRATED OPTICS; LIGHT REFRACTION; LITHOGRAPHY; MATHEMATICAL MODELS; MICROLENSES; OPTICAL SYSTEMS; ULTRAVIOLET RADIATION;

FREE SPACE OPTICS; INTEGRATED OPTICAL SYSTEM; OUT-OF-PLANE MICROLENS; QUASI PARABOLIC SURFACE; TILTED LITHOGRAPHY;

MICROOPTICS;

EID: 12844257537     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1814362     Document Type: Article

References (16)

1. S.-K. Lee, K.-C. Lee, and S. S. Lee, "A simple method for microlens fabrication by the modified LIGA process," J. Micromech. Microeng. 12(3), 334-340 (2002).
2. L.-W. Pan, L. Lin, and J. Ni, "Cylindrical plastic lens array fabricated by a micro intrusion process," Proc. IEEE 87, 217-221 (1999).
3. S. Haselbeck, M. Eisner, H. Schreiber, and J. Schwider, "Reactive ion etching of microlens arrays into fused silica," Proc. SPIE 2169, 142-146 (1994).
4. M. Severi and P. Mottier, "Etching selectivity control during resist pattern transfer into silica for the fabrication of microlenses with reduced spherical aberration," Opt. Eng. 38(1), 146-150 (1999).
5. R. Yang, K. Foong Chan, Z. Feng, I. Akihito, and W. Mei, "Design and fabrication of microlens and spatial filter array by self-alignment for maskless lithography systems," J. Microlithogr., Microfabr., Microsyst. 2(3), 210-219 (2003).
6. Y.-S. Kim, J. Kim, and H. Jeon, "Semiconductor microlenses fabricated by one-step wet etching," in Proc. Pacific Rim Conf. on Lasers and Electro-Optics, CLEO - Technical Digest, pp. 213-214 (2000).
7. C. R. King, L. Y. Lin, and M. C. Wu, "Out-of-plane refractive microlens fabricated by surface micromachining," IEEE Photonics Technol. Lett. 8(10), 1349-1351 (1996).
8. M. C. Wu, "Micromachining for optical and optoelectronic systems," Proc. IEEE 85(11), 1833-1856 (1997).
9. M. C. Wu, L. Y. Lin, S. S. Lee, and C. R. King, "Free-space integrated optics realized by surface micromaching," Int. J. High Speed Electron. Syst. 8(2), 51-65 (1997).
10. Y. W. Yi and C. Liu, "Assembly of micro optical components using magnetic actuation," Sens. Actuators, A 78, 205-211 (1999).
11. J. Gottert, J. Mohr, and C. Muller, "Examples and potential applications of LIGA components in microoptics," in Integrierte Optik und Mikrooptik mit Polymeren, Maniz, Germany (1992).
12. J. A. Cox, D. C. Dobson, T. Ohnstein, and J. D. Zook, "Optical performance of high-aspect LIGA grating II," Opt. Eng. 37 11), 2878-2884 (1998).
13. J. Hossfeld, T. Paatzsch, J. Schultze, M. Neumeier, L. Weber, H.-D. Bauer, and W. Ehrfeld, "Polymetric optical MEMS," in Proc. Symp. on Design, Test, and Microfabrication of MEMS and MEOMS, pp., Paris (1999).
14. C. Collins, R. Miles et al., "A new micro-machined millimeter-wave and terahertz snap-together rectangular waveguide technology," IEEE Microw. Guid. Wave Lett. 9(2), 63-65 (1999).
15. A. Borreman, S. Musa, A. Kok, M. Diemeer, and A. Driessen, " Fabrication of polymeric multimode waveguides and devices in S-8 photoresist using selective polymerization," in Proc. Symposium IEEE/LEOS Benelux Chapter, pp. 83-86, Amsterdam (2002).
16. R. Yang and W. Wang, "Fabrication of out-of-plane S-8 refractive microlens using directly lithography method," Proc. SPIE 5346 151-159 (2004).