Fabrication of out-of-plane SU-8 refractive microlens using directly lithography method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5346, Issue , 2004, Pages 151-159

  Yang, Ren ^a   Wang, Wanjun ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

3 D lithography; Free space; Optical bench; Out of space; Pre alignment; Refractive microlens; SU 8

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; FABRICATION; OPTICAL SYSTEMS; PHOTOLITHOGRAPHY; PHOTORESISTS; SURFACE TENSION;

3-D LITHOGRAPHY; HINGED LENSES; OUT-OF-SPACE; REFRACTIVE MICROLENSES;

MICROLENSES;

EID: 2142679304     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.530780     Document Type: Conference Paper

References (4)

1. C.R. King; L.Y. Lin; M.C. Wu; "Out-of-Plane Refractive Microlens Fabricated by Surface Micromachining", IEEE Photonics Technology Letters, Vol. 8, No. 10, pp 1349-1351, October 1996
2. M. C. Wu, "Micromachining for Optical and Optoelectronic Systems," Proceeding IEEE, Vol. 85, No. 11, pp. 1833-1856, November 1997.
3. M. C. Wu, L. Y. Lin, S. S. Lee, and C. R. King, "Free-space integrated optics realized by surface micromaching", International Journal of High Speed Electronics and Systems, Vol. 8, No. 2, pp. 51-65, August 1997
4. Yong W. Yi, Chang Liu, "Assembly of Micro Optical Components Using Magnetic Actuation", Sensors and Actuators A, Vol.78, 1999, P205-211