Semiconductor microlenses fabricated by one-step wet etching

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Volumn , Issue , 2000, Pages 213-214

  Kim, Yu Sik ^a   Kim, Jaehoon ^a   Jeon, H ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CURVE FITTING; ETCHING; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICES; SILICON NITRIDE;

DIFFUSION LIMITED ETCHING; ONE STEP WET ETCHING; SEMICONDUCTOR MICROLENSES;

LENSES;

EID: 0034542901     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (3)