Fabrication and characterization of low-loss TFMS on silicon substrate up to 220 GHz

IEEE Transactions on Microwave Theory and Techniques

Volumn 53, Issue 1, 2005, Pages 301-304

  Six, Gonzague ^a   Prigent, Gaëtan ^b   Rius, Eric ^b   Dambrine, Gilles ^a   Happy, Henri ^a  

^a INSTITUT D ELECTRONIQUE   (France)

^b ECOLE DES MINES DE NANTES   (France)

Author keywords

Dielectric film; Low resistivity silicon substrate; Silicon; Silicon monolithic microwave integrated circuits (MMICs); Transmission lines

Indexed keywords

DIELECTRIC FILMS; ELECTRIC LINES; FREQUENCIES; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; OPTIMIZATION; SILICON; THIN FILMS; WAVEGUIDES;

CUTOFF FREQUENCY; DIELECTRIC THICKNESS; LOW-RESISTIVITY SILICON SUBSTRATE; SILICON MONOLITHIC MICROWAVE INTEGRATED CIRCUITS (MMIC);

MICROSTRIP LINES;

EID: 12444340911     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2004.839915     Document Type: Conference Paper

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