Design and fabrication of micromachined passive microwave filtering elements in CMOS technology

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1007-1010

  Milanovic, Veljko ^a   Gaitan, Michael ^a   Bowen, Edwin D ^a   Tea, Nim H ^a   Zaghloul, Mona E ^a  

^a GEORGE WASHINGTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC LINES; FABRICATION; NATURAL FREQUENCIES; SUBSTRATES;

MICROMACHINED PASSIVE MICROWAVE FILTERING ELEMENTS; TRANSMISSION LOSS;

MICROWAVE FILTERS;

EID: 0030655637     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)