RF transmission lines on silicon substrates

1999 29th European Microwave Conference, EuMC 1999

Volumn 1, Issue , 1999, Pages 158-161

  Ponchak, George E ^a  

^a NASA GLENN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PASSIVATION; SILICON; SILICON WAFERS; TRANSMISSION LINE THEORY;

CONDUCTOR LOSS; LOW RESISTIVITY; MEASURED RESULTS; PASSIVATION LAYER; PER UNIT LENGTH; POLYIMIDE LAYERS; SILICON SUBSTRATES; THIN-FILM MICROSTRIP;

ELECTRIC LINES;

EID: 84897477231     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMA.1999.338297     Document Type: Conference Paper

References (12)

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