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Applied Physics A: Materials Science and Processing

Volumn 80, Issue 4, 2005, Pages 851-859

Improvement of the PLD process assisted by RF plasma for AlN growth

(6) Basillais, A a Benzerga, R a Sanchez, H a Lemenn, E a Boulmer Leborgne, C a Perriere J b

a UNIVERSITÉ D'ORLÉANS (France)

b INSTITUT DES NANOSCIENCES DE PARIS (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; CARRIER CONCENTRATION; LASER BEAMS; MORPHOLOGY; PLASMA DIAGNOSTICS; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

OXIDE THIN FILMS; PLASMA ASSISTED-PULSED-LASER DEPOSITION; PLASMA SPECTROSCOPY; RADIO-FREQUENCY (RF) PLASMA;

FILM GROWTH;

EID: 12444300232 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-003-2325-z Document Type: Article

Times cited : (15)

References (44)

1
- 0003592140
- Wiley, New York
- D.B. Chrisey, G.K. Huber: Pulsed Laser Deposition of Thin Films (Wiley, New York 1994)
- (1994) Pulsed Laser Deposition of Thin Films
- Chrisey, D.B.¹ Huber, G.K.²

2
- 0034338316
- P.R. Willmott, J.R. Huber: Rev. Mod. Phys. 72, 315 (2000)
- (2000) Rev. Mod. Phys. , vol.72 , pp. 315
- Willmott, P.R.¹ Huber, J.R.²

3
- 0029203891
- S.A. Cao, J. Pedraza, L.F. Allard: J. Mater. Res. 10, 54 (1995)
- (1995) J. Mater. Res. , vol.10 , pp. 54
- Cao, S.A.¹ Pedraza, J.² Allard, L.F.³

4
- 0001448492
- R.D. Vispute, H. Wu, J. Narayan: Appl. Phys. Lett. 67, 1549 (1995)
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1549
- Vispute, R.D.¹ Wu, H.² Narayan, J.³

5
- 0034501862
- A. Basillais, C. Boulmer-Leborgne, J. Mathias, N. Laidani, A. Laurent, J. Perrière: Appl. Phys. A 71, 619 (2000)
- (2000) Appl. Phys. A , vol.71 , pp. 619
- Basillais, A.¹ Boulmer-Leborgne, C.² Mathias, J.³ Laidani, N.⁴ Laurent, A.⁵ Perrière, J.⁶

6
- 12444284205
- PhD Thesis, Université d'Orléans, France
- A. Basillais: PhD Thesis, Université d'Orléans, France (2000)
- (2000)
- Basillais, A.¹

7
- 0041579891
- G.S. Sudhir, H. Fujii, W.S. Wong, C. Kisielowski, N. Newman, C. Dieker, Z. Lilienthal-Weber, M.D. Rubin, E.R. Weber: J. Electron. Mater. 27, 215 (1998)
- (1998) J. Electron. Mater. , vol.27 , pp. 215
- Sudhir, G.S.¹ Fujii, H.² Wong, W.S.³ Kisielowski, C.⁴ Newman, N.⁵ Dieker, C.⁶ Lilienthal-Weber, Z.⁷ Rubin, M.D.⁸ Weber, E.R.⁹

8
- 0037185194
- V. Craciun, N. Bassim, R.K. Singh, D. Craciun, J. Hermann, C. Boulmer-Leborgne: Appl. Surf. Sci. 186, 288 (2002)
- (2002) Appl. Surf. Sci. , vol.186 , pp. 288
- Craciun, V.¹ Bassim, N.² Singh, R.K.³ Craciun, D.⁴ Hermann, J.⁵ Boulmer-Leborgne, C.⁶

9
- 0039637949
- A.B. Beavitt: Thin Solid Films 1, 69 (1967)
- (1967) Thin Solid Films , vol.1 , pp. 69
- Beavitt, A.B.¹

10
- 0343200547
- W.P. Barr: J. Phys. E 2, 1112 (1969)
- (1969) J. Phys. E , vol.2 , pp. 1112
- Barr, W.P.¹

11
- 0024908229
- H. Dupendant, J.P. Gavigan, D. Givord, A. Liénard, J.P. Rebouillat, Y. Souche: Appl. Surf. Sci. 43, 369 (1989)
- (1989) Appl. Surf. Sci. , vol.43 , pp. 369
- Dupendant, H.¹ Gavigan, J.P.² Givord, D.³ Liénard, A.⁴ Rebouillat, J.P.⁵ Souche, Y.⁶

12
- 0040824536
- T. Venkatesan, X.D. Wu, R.E. Muenchausen, A. Pique: Mater. Res. Bull. 17, 54 (1992)
- (1992) Mater. Res. Bull. , vol.17 , pp. 54
- Venkatesan, T.¹ Wu, X.D.² Muenchausen, R.E.³ Pique, A.⁴

13
- 0039637947
- N. Cherief, D. Givord, A. Lienard, K. Mackay, O.F.K. McGrath, J.P. Rebouillat, F. Robaut, Y. Souche: J. Magn. Mater. 121, 94 (1993)
- (1993) J. Magn. Mater. , vol.121 , pp. 94
- Cherief, N.¹ Givord, D.² Lienard, A.³ Mackay, K.⁴ McGrath, O.F.K.⁵ Rebouillat, J.P.⁶ Robaut, F.⁷ Souche, Y.⁸

14
- 0000661722
- D. Lubben, S.A. Barnett, K. Suzuki, S. Gorbatkin, J.E. Green: J. Vac. Sci. Technol. B 3, 968 (1985)
- (1985) J. Vac. Sci. Technol. B , vol.3 , pp. 968
- Lubben, D.¹ Barnett, S.A.² Suzuki, K.³ Gorbatkin, S.⁴ Green, J.E.⁵

15
- 36449008976
- C. Doughty, A.T. Findikoglu, T. Venkatesan: Appl. Phys. Lett. 66, 1276 (1995)
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1276
- Doughty, C.¹ Findikoglu, A.T.² Venkatesan, T.³

16
- 11744335866
- H. Sankur, W.J. Gunning, J. DeNatale, J.F. Flintoff: Appl. Phys. Lett. 56, 2475 (1989)
- (1989) Appl. Phys. Lett. , vol.56 , pp. 2475
- Sankur, H.¹ Gunning, W.J.² DeNatale, J.³ Flintoff, J.F.⁴

17
- 0000257441
- R.F. Xiao, H.B. Liao, X.W. Sun, H.S. Kwok: J. Appl. Phys. 80, 4226 (1996)
- (1996) J. Appl. Phys. , vol.80 , pp. 4226
- Xiao, R.F.¹ Liao, H.B.² Sun, X.W.³ Kwok, H.S.⁴

18
- 0040878330
- P.R. Willmott, F. Antoni: Appl. Phys. Lett. 73, 1334 (1998)
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1334
- Willmott, P.R.¹ Antoni, F.²

19
- 0026897199
- R.J. Kennedy: Thin Solid Films 214, 223 (1992)
- (1992) Thin Solid Films , vol.214 , pp. 223
- Kennedy, R.J.¹

20
- 0029271026
- S. Witanachchi, K. Ahmed, P. Sakthivel, P. Mukherjee: Appl. Phys. Lett. 66, 1469 (1995)
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1469
- Witanachchi, S.¹ Ahmed, K.² Sakthivel, P.³ Mukherjee, P.⁴

21
- 0030562894
- A. Gorbunov, W. Pompe, A. Sewing, S. Gaponov, A.D. Akhsakhalyan, I.G. Zabrodin, I.A. Kas'kov, E.B. Klyenkov, A.P. Morozov, N.N. Salashchenko, R. Dietsch, H. Mai, S. Völmar: Appl. Surf. Sci. 96-98, 649 (1996)
- (1996) Appl. Surf. Sci. , vol.96-98 , pp. 649
- Gorbunov, A.¹ Pompe, W.² Sewing, A.³ Gaponov, S.⁴ Akhsakhalyan, A.D.⁵ Zabrodin, I.G.⁶ Kas'kov, I.A.⁷ Klyenkov, E.B.⁸ Morozov, A.P.⁹ Salashchenko, N.N.¹⁰ Dietsch, R.¹¹ Mai, H.¹² Völmar, S.¹³

22
- 0347811914
- L. Lambert, F. Grangeon, M. Autric: Appl. Surf. Sci. 138-139, 574 (1999)
- (1999) Appl. Surf. Sci. , vol.138-139 , pp. 574
- Lambert, L.¹ Grangeon, F.² Autric, M.³

23
- 0042399603
- T. Thäringen, G. Lippold, V. Riede, M. Lorenz, K.J. Koivusaari, D. Lorenz, S. Mosch, P. Grau, R. Hesse, P. Streubel, R. Szargan: Thin Solid Films 348, 103 (1999)
- (1999) Thin Solid Films , vol.348 , pp. 103
- Thäringen, T.¹ Lippold, G.² Riede, V.³ Lorenz, M.⁴ Koivusaari, K.J.⁵ Lorenz, D.⁶ Mosch, S.⁷ Grau, P.⁸ Hesse, R.⁹ Streubel, P.¹⁰ Szargan, R.¹¹

24
- 0005882095
- N. Materer, R.S. Goodman, S.R. Leonel: J. Appl. Phys. 83, 1917 (1998)
- (1998) J. Appl. Phys. , vol.83 , pp. 1917
- Materer, N.¹ Goodman, R.S.² Leonel, S.R.³

25
- 0032678019
- R.D. Vispute, S. Choopun, R. Enck, A. Patel, V. Talyansky, R.P. Sharma, T. Venkatesan, W.L. Sarney, L.G. Salamanca-Riba, S.N. Andronescu, A.A. Iliadis, K.A. Jones: J. Electron. Mater. 2, 275 (1999)
- (1999) J. Electron. Mater. , vol.2 , pp. 275
- Vispute, R.D.¹ Choopun, S.² Enck, R.³ Patel, A.⁴ Talyansky, V.⁵ Sharma, R.P.⁶ Venkatesan, T.⁷ Sarney, W.L.⁸ Salamanca-Riba, L.G.⁹ Andronescu, S.N.¹⁰ Iliadis, A.A.¹¹ Jones, K.A.¹²

26
- 0000303647
- J. Hermann, C. Boulmer-Leborgne, D. Hong: J. Appl. Phys. 83, 691 (1998)
- (1998) J. Appl. Phys. , vol.83 , pp. 691
- Hermann, J.¹ Boulmer-Leborgne, C.² Hong, D.³

27
- 0032069730
- C. Vivien, J. Hermann, A. Peronne, C. Boulmer-Leborgne, A. Luches: J. Phys. D: Appl. Phys. 31, 1263 (1998)
- (1998) J. Phys. D: Appl. Phys. , vol.31 , pp. 1263
- Vivien, C.¹ Hermann, J.² Peronne, A.³ Boulmer-Leborgne, C.⁴ Luches, A.⁵

28
- 0003627262
- NSRDS-NBS 4, Washington
- W.L. Wiese, M.W. Smith, B.M. Miles: Atomic Transition Probabilities, Vol. 1 (NSRDS-NBS 4, Washington 1966)
- (1966) Atomic Transition Probabilities , vol.1
- Wiese, W.L.¹ Smith, M.W.² Miles, B.M.³

29
- 0003740740
- Chapman and Hall, London
- R.W.B. Pearse, A.G. Gaydon: The Identification of Molecular Spectra, 3rd edn. (Chapman and Hall, London 1965)
- (1965) The Identification of Molecular Spectra, 3rd Edn.
- Pearse, R.W.B.¹ Gaydon, A.G.²

30
- 0033077372
- A.R. De Souza, M. Digiacomo, J.L.R. Muzart, J. Nahorny, A. Ricard: Eur. Phys. J. Appl. Phys. 5, 185 (1999)
- (1999) Eur. Phys. J. Appl. Phys. , vol.5 , pp. 185
- De Souza, A.R.¹ Digiacomo, M.² Muzart, J.L.R.³ Nahorny, J.⁴ Ricard, A.⁵

31
- 1542416000
- J. Hermann, C. Boulmer-Leborgne, B. Dubreuil, I.N. Mihailescu: J. Appl. Phys. 71, 5629 (1992)
- (1992) J. Appl. Phys. , vol.71 , pp. 5629
- Hermann, J.¹ Boulmer-Leborgne, C.² Dubreuil, B.³ Mihailescu, I.N.⁴

32
- 0026946833
- D.B. Geohegan: Thin Solid Films 220, 138 (1992)
- (1992) Thin Solid Films , vol.220 , pp. 138
- Geohegan, D.B.¹

33
- 0037185107
- A. Basillais, C. Boulmer-Leborgne, J. Mathias, J. Perrière: Appl. Surf. Sci. 186, 416 (2002)
- (2002) Appl. Surf. Sci. , vol.186 , pp. 416
- Basillais, A.¹ Boulmer-Leborgne, C.² Mathias, J.³ Perrière, J.⁴

34
- 0003886662
- Springer, Berlin
- A.A. Radzig, B.M. Smirnov: Reference Data on Atoms, Molecules and Ions (Springer, Berlin 1985)
- (1985) Reference Data on Atoms, Molecules and Ions
- Radzig, A.A.¹ Smirnov, B.M.²

35
- 0031176740
- B.M. Penetrante, J.N. Bardsley, M.C. Hsiao: Jpn. J. Appl. Phys. 3, 5007 (1997)
- (1997) Jpn. J. Appl. Phys. , vol.3 , pp. 5007
- Penetrante, B.M.¹ Bardsley, J.N.² Hsiao, M.C.³

36
- 0000403123
- Z.M. Ren, Y.F. Lu, H.Q. Ni, T.Y.F. Liew, B.A. Cheong, S.K. Chow, M.L. Ng, J.P. Wang: J. Appl. Phys. 88, 7346 (2000)
- (2000) J. Appl. Phys. , vol.88 , pp. 7346
- Ren, Z.M.¹ Lu, Y.F.² Ni, H.Q.³ Liew, T.Y.F.⁴ Cheong, B.A.⁵ Chow, S.K.⁶ Ng, M.L.⁷ Wang, J.P.⁸

37
- 0032330539
- M. He, N. Cheng, P. Zhou, H. Okabe, J.B. Halpern: J. Vac. Sci. Technol. A 16, 2372 (1998)
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 2372
- He, M.¹ Cheng, N.² Zhou, P.³ Okabe, H.⁴ Halpern, J.B.⁵

38
- 0003392733
- North Holland/American Elsevier, Amsterdam
- S. Bashkin, J.O. Stoner Jr.: Atomic Energy Levels and Grotrian Diagrams, Vol. 1 (North Holland/American Elsevier, Amsterdam 1975)
- (1975) Atomic Energy Levels and Grotrian Diagrams , vol.1
- Bashkin, S.¹ Stoner Jr., J.O.²

39
- 0344635359
- K. Dovidenko, S. Oktyabrsky, J. Narayan: J. Appl. Phys. 79, 2439 (1996)
- (1996) J. Appl. Phys. , vol.79 , pp. 2439
- Dovidenko, K.¹ Oktyabrsky, S.² Narayan, J.³

40
- 0000052222
- O. Guillot-Noel, R. Gomez-San Roman, J. Perrière, J. Hermann, V. Craciun, C. Boulmer-Leborgne, P. Barboux: J. Appl. Phys. 80, 1803 (1996)
- (1996) J. Appl. Phys. , vol.80 , pp. 1803
- Guillot-Noel, O.¹ Roman, R.G.-S.² Perrière, J.³ Hermann, J.⁴ Craciun, V.⁵ Boulmer-Leborgne, C.⁶ Barboux, P.⁷

41
- 0035363105
- A. Tselev, A. Gorbunov, W. Pompe: Rev. Sci. Instrum. 72, 2665 (2001)
- (2001) Rev. Sci. Instrum. , vol.72 , pp. 2665
- Tselev, A.¹ Gorbunov, A.² Pompe, W.³

42
- 0019563414
- S.V. Gaponov, A.A. Gudkov, B.M. Luskin, V.I. Luchin, N.N. Salashchenko: Sov. Phys. Tech. Phys. 26, 598 (1981)
- (1981) Sov. Phys. Tech. Phys. , vol.26 , pp. 598
- Gaponov, S.V.¹ Gudkov, A.A.² Luskin, B.M.³ Luchin, V.I.⁴ Salashchenko, N.N.⁵

43
- 3743114716
- C. Girault, D. Damiani, C. Champeaux, P. Marchet, J.P. Mercurio, J. Aubreton, A. Catherinot: Appl. Phys. Lett. 56, 1472 (1990)
- (1990) Appl. Phys. Lett. , vol.56 , pp. 1472
- Girault, C.¹ Damiani, D.² Champeaux, C.³ Marchet, P.⁴ Mercurio, J.P.⁵ Aubreton, J.⁶ Catherinot, A.⁷

44
- 0026225805
- K. Deneffe, P. Van Mieghem, B. Brijs, W. Vandervorst, R. Mertens, G. Borghs: Jpn. J. Appl. Phys. 30, 1959 (1991)
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 1959
- Deneffe, K.¹ Van Mieghem, P.² Brijs, B.³ Vandervorst, W.⁴ Mertens, R.⁵ Borghs, G.⁶

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