Aluminum nitride films on different orientations of sapphire and silicon

Journal of Applied Physics

Volumn 79, Issue 5, 1996, Pages 2439-2445

  Dovidenko, K ^a   Oktyabrsky, S ^a   Narayan, J ^a   Razeghi, M ^b  

^a North Carolina State University   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344635359     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361172     Document Type: Article

References (16)

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