Aluminum nitride films on different orientations of sapphire and silicon

Journal of Applied Physics

Volumn 79, Issue 5, 1996, Pages 2439-2445

  Dovidenko, K ^a   Oktyabrsky, S ^a   Narayan, J ^a   Razeghi, M ^b  

^a Campus Box 7908   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344635359     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361172     Document Type: Article

References (16)

1. S. Strite and H. Morkoç, J. Vac. Sci. Technol. B 10, 1237 (1992).
2. J. Narayan, P. Tiwary, X. Chen, J. Singh, R. Chowdhury, and T. Zheleva, Appl. Phys. Lett. 61, 1290 (1990); U.S. Patent No. 5 406 123 (11 April 1995).
3. J. Narayan, P. Tiwary, X. Chen, J. Singh, R. Chowdhury, and T. Zheleva, Appl. Phys. Lett. 61, 1290 (1990); U.S. Patent No. 5 406 123 (11 April 1995).
4. J. Hwang, A. V. Kuznetsov, S. S. Lee, H. S. Kim, J. G. Choi, and P. J. Chong, J. Cryst. Growth 142, 5 (1994).
5. R. C. Powell, G. A. Tomasch, Y. W. Kim, J. A. Thornton, and J. E. Greene, in Diamond, Silicon Carbide and Related Wide Bandgap Semiconductors, MRS Proc. Vol. 162, 525, edited by J. T. Glass, R. Messier, and N. Fujimori (MRS, Pittsburgh, 1990).
6. T. Sasaki and S. Zambutsu, J. Appl. Phys. 61, 2533 (1987).
7. C. J. Sun, P. Kung, A. Saxler, H. Ohsato, K. Haritos, and M. Razeghi, J. Appl. Phys. 75, 3964 (1994).
8. A. Saxler, P. Kung, C. J. Sun., E. Bigan, and M. Razeghi, Appl. Phys. Lett. 64, 339 (1993).
9. K. Dovidenko, S. Oktyabrsky, J. Narayan, and M. Razeghi, in Microcrystalline and Nanocrystalline Semiconductors, MRS Proc. Vol. 358. edited by R. W. Collins, C. C. Tsai, M. Hiros, F. Koch, and L. Brus (MRS, Pittsburgh, 1995).
10. W. Meng, J. Heremans, and Y. T. Cheng, Appl. Phys. Lett. 59, 2097 (1991).
11. Z. Wei, R. Vargas, T. Goto, Y. Someno, and T. Hirai, Appl. Phys. Lett. 64, 1359 (1994).
12. R. D. Vitpute, J. Narayan, H. Wu, and K. Jagannadham, J. Appl. Phys. 77, 4724 (1995).
13. R. Rodriguez-Clemente, B. Aspar, N. Azema, B. Armas, C. Combescure, J. Durand, and A. Figueras, J. Cryst. Growth 113, 59 (1993).
14. R. D. Vispute, W. Hong, and J. Narayan, Appl. Phys. Lett. (unpublished).
15. J. Michel, I. Masson, S. Choux, and A. George, Phys. Status Solidi A 146, 97 (1994).
16. A. D. Westwood and M. R. Notits, J. Am. Ceram. Soc. 74, 1226 (1991).