An interrogation of the zinc oxide-gallium oxide phase space by plasma enhanced chemical vapor deposition

Journal of Crystal Growth

Volumn 263, Issue 1-4, 2004, Pages 283-290

  Robbins, J J ^a   Fry, C ^a   Wolden, C A ^a  

^a Department of Geology and Geological Engineering   (United States)

Author keywords

A1. Phase diagrams; A3. Metalorganic chemical vapor deposition; B1. Gallium compounds; B1. Oxides; B1. Zinc compounds

Indexed keywords

GALLIUM COMPOUNDS; LIGHT EMISSION; ORGANOMETALLICS; PHASE DIAGRAMS; PHASE SPACE METHODS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

DEPOSITION RATE; PHASE SPACE;

POLYCRYSTALLINE MATERIALS;

EID: 1242263856     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2003.10.093     Document Type: Article

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