An Investigation of the Plasma Chemistry Involved in the Synthesis of ZnO by PECVD

Journal of the Electrochemical Society

Volumn 150, Issue 10, 2003, Pages

  Robbins, Joshua J ^a   Esteban, James ^a   Fry, Cassandra ^a   Wolden, Colin A ^a  

^a Department of Geology and Geological Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS;

PLASMA CHEMISTRY;

ZINC OXIDE;

EID: 0142021043     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1605746     Document Type: Article

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