The effects of space charge on contrast in images obtained using the environmental scanning electron microscope

Scanning

Volumn 22, Issue 5, 2000, Pages 319-325

  Toth, M ^a   Philips, M R ^a  

^a UNIVERSITY OF TECHNOLOGY SYDNEY   (Australia)

Author keywords

Contrast; Environmental scanning electron microscope; Space charge

Indexed keywords

ARTICLE; CONTRAST; ELECTRIC FIELD; ELECTRICITY; IMAGE QUALITY; ION CURRENT; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPE;

ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY;

BACKSCATTERING; CARRIER MOBILITY; CHARGE CARRIERS; ELECTRIC SPACE CHARGE; IMAGE ANALYSIS; IMAGE QUALITY; MATHEMATICAL MODELS;

SCANNING ELECTRON MICROSCOPY;

EID: 0034487825     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950220507     Document Type: Article

References (14)

1. Foundations of environmental scanning electron microscopy
2. Theory of the gaseous detector device in the environmental scanning electron microscope
3. Amplification measurements of alternative gases in environmental SEM
4. Electron-ion recombination processe - An overview
5. Explanation of memory curve for nitrogen by surface-catalysed excitation
6. Surface recombination of atoms in a nitrogen afterglow
7. Surface recombination in breakdown time delay experiments - Effect of different cathode materials
8. Electron-gas interactions in the environmental scanning electron microscopes gaseous detector
9. Secondary electron imaging in the variable pressure scanning electron microscope
10. Charge neutralisation of insulating surfaces in the SEM by gas ionisation
11. An improved model for gaseous amplification in the environmental SEM