Consequences of positive ions upon imaging in low vacuum scanning electron microscopy

Journal of Microscopy

Volumn 205, Issue 1, 2002, Pages 96-105

  Craven, J P ^a   Baker, F S ^a   Thiel, B L ^a   Donald, A M ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Electron ion recombination; ESEM; Low vacuum SEM; Positive ions; SEM; Space charge

Indexed keywords

ELECTRIC GROUNDING; IMAGE ENHANCEMENT; IONIZATION OF GASES; SCANNING ELECTRON MICROSCOPY;

DIFFERENT CLASS; ELECTRON-ION RECOMBINATIONS; ENVIRONMENTAL SCANNING ELECTRON MICROSCOPES; GROUNDED CONDUCTORS; IMAGING CONDITIONS; IONIZED GAS MOLECULES; LOW VACUUM; LOW-VACUUM SEM; SPECIMEN CHARGING; VARIABLE PRESSURE SCANNING ELECTRON MICROSCOPE;

POSITIVE IONS;

ION;

ARTICLE; CONDUCTOR; DEVICE; ELECTRICITY; IMAGE ENHANCEMENT; IMAGE QUALITY; IMAGING; IONIZATION; MOLECULE; PRESSURE; PRIORITY JOURNAL; SAMPLE; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRON MICROSCOPY; SURFACE CHARGE; VACUUM;

EID: 0036163257     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.0022-2720.2001.00969.x     Document Type: Article

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