The impact of charging on low-energy electron beam lithography

Microscopy and Microanalysis

Volumn 10, Issue 6, 2004, Pages 804-809

  Mun, Lau Kien ^a   Drouin, Dominique ^a   Lavallée, Eric ^a   Beauvais, Jacques ^a  

^a UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

Charge induced distortion; Crossover voltage; LVEBL; Scanning electron microscope; Silicide; X ray mask

Indexed keywords

EID: 11244331574     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927604040711     Document Type: Conference Paper

References (15)

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