Reduction of charging effects using vector scanning in the scanning electron microscope

Scanning

Volumn 23, Issue 6, 2001, Pages 395-402

  Thong, J T L ^a   Lee, K W ^a   Wong, W K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Raster scan; Scanning electron microscopy; Specimen charging; Vector scanning

Indexed keywords

IMAGING TECHNIQUES; SCANNING ELECTRON MICROSCOPY;

VECTOR SCANNING SYSTEM;

MICROSCOPES;

APPARATUS; ARTICLE; ARTIFACT REDUCTION; IMAGE ANALYSIS; IMAGING SYSTEM; INTERMETHOD COMPARISON; LASER MICROSCOPY; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRON MICROSCOPY; TECHNIQUE;

EID: 0035204331     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950230606     Document Type: Article

References (9)

1. Improving the speed of scanning electron microscope deflection systems
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6. Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope. Proc. Scanning 2001
7. Observations on uncoated, nonconducting or thermally sensitive specimens using a fast scanning field emission source SEM
8. Charge control using pulsed scanning electron microscopy
9. Charging identification and compensation in the scanning electron microscope