Improvements to the floating double probe for time-resolved measurements in pulsed rf plasmas

Review of Scientific Instruments

Volumn 69, Issue 3, 1998, Pages 1372-1377

  Smith, Brian A ^a   Overzet, Lawrence J ^a  

^a The University of Texas at Dallas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000517888     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148768     Document Type: Article

References (12)

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