Molecular dynamics simulation of nano-lithography process using atomic force microscopy

Surface Science

Volumn 501, Issue 1-2, 2002, Pages 138-147

  Fang, Te Hua ^a,b   Weng, Cheng I ^b   Chang, Jee Gong ^b  

^a SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Atomic force microscopy; Molecular dynamics

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; CUTTING TOOLS; MOLECULAR DYNAMICS; SURFACE ROUGHNESS;

INTERATOMIC FORCES; MORSE POTENTIAL FUNCTIONS;

NANOTECHNOLOGY;

EID: 0037139263     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(01)01938-0     Document Type: Article

References (24)

1. Direct writing in Si with a scanning tunneling microscope
2. Thermomechanical writing with an atomic force microscope
3. A study of atomic scale processing using an atomic force microscope
4. Fabrication of silcon and metal nanowires and dots using mechanical atomic force lithography
5. Atomic force microscopy lithography as a nanodevice development technique
6. Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope
7. Atomistic mechanisms and dynamics of adhesion, nanoindentation, and fracture
8. Atomistic mechanisms of adhesive contact formation and interfacial processes
9. Atomistic mechanisms of adhesion and compression of diamond surfaces
10. Nanoscale investigation of indention, adhesion, and fracture of diamond (1 1 1) surface
11. Thermal diffusion processes in metal-tip-surface interactions: Contact formation and adatom mobility
12. Simulation of surface defects
13. Molecular dynamics simulation of friction on the atomic scale
14. Effect of tool geometry in nanometric cutting: A molecular dynamics simulation approach
15. Friction and tool wear in nano-scale machining - A molecular dynamics approach
16. Towards a deeper understanding of wear and friction on the atomic scale - A molecular dynamics analysis
17. A molecular dynamics model of the orthogonal cutting process
18. Simulation of nanometer-scale deformation of metallic and ceramic surfaces
19. Three-dimensional molecular dynamics simulation of atomic scale precision processing using a pin tool
20. Molecular dynamics simulation of atomic scale indentation and cutting process with atomic force microscope
21. Three-dimensional molecular dynamics analysis of processing using a pin tool on the atomic scale
22. Machining characterization of nano-lithography process by using atomic force microscopy