Rapid prototyping of polymer-based MEMS devices using UV YAG laser

Journal of Micromechanics and Microengineering

Volumn 14, Issue 12, 2004, Pages 1682-1686

  Yung, K C ^a   Mei, S M ^a   Yue, T M ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC POTENTIAL; INTEGRATED CIRCUITS; MICROELECTRONICS; MICROMACHINING; RAPID PROTOTYPING; SENSORS;

LITHOGRAPHY-BASED TECHNOLOGIES; MICRO MECHANICAL ELEMENTS; MICRO PATTERNING; SHOCK SIGNALS;

MICROELECTROMECHANICAL DEVICES;

EID: 10844285695     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/12/012     Document Type: Article

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