Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling

Sensors and Actuators, A: Physical

Volumn 76, Issue 1-3, 1999, Pages 381-385

  Dauer, S ^a   Ehlert, A ^a   Buttgenbach S ^a  

^a Institut für Mikrotechnik   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY DOUBLERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NEODYMIUM LASERS; RAPID PROTOTYPING; SILICON WAFERS; THIN FILMS;

LASER CUTTING; OPTIONAL FREQUENCY DOUBLING; SILICON MEMBRANES;

Q SWITCHED LASERS;

EID: 0343932625     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00029-1     Document Type: Article

References (8)

1. Müllenborn M., Dirac H., Petersen J., Bouwstra S. Fast three-dimensional laser micromachining of silicon for microsystems. Sensors and Actuators A. 52:1996;121-125.
2. Rohde M., Schüssler A. On the response-time behaviour of laser micromachined NiTi shape memory actuators. Sensors and Actuators A. 61:1997;463-468.
3. G. Chryssolouris, Laser Machining, Springer, Berlin, 1991.
4. 2 Laser Cutting, Springer, Berlin, 1993.
5. W. Koechner, Solid-State Laser Engineering, Springer, Berlin, 1996.
6. Alavi M., Büttgenbach S., Schumacher A., Wagner H.J. Fabrication of microchannels by laser machining and anisotropic etching of silicon. Sensors and Actuators A. 32:1992;299-302.
7. C. Ashby, Laser Driven Etching, Thin Film Processes II, Academic Press, San Diego, 1991.
8. A. Ehlert, S. Dauer, S. Büttgenbach, Micro-Optical Fluidic Analysis System for Environmental and Quality Control, Proc. Int. Conf. Micro System Technologies, Potsdam, 1998, pp. 189-194.