Laser processes for MEMS manufacture

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4426, Issue , 2002, Pages 203-209

  Holmes, Andrew S ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Laser ablation; Laser micromachining; Laser assisted assembly; Laser induced forward transfer; Laser LIGA; Microelectromechanical systems; Micromotors; Microturbines

Indexed keywords

ELECTROPLATING; ELECTROSTATICS; EXCIMER LASERS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SUBSTRATES; ULTRAVIOLET RADIATION;

LASER MICROMACHINING;

LASER ABLATION;

EID: 0036384639     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.456807     Document Type: Conference Paper

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