The effect of preferred orientation on the mechanical properties of chromium nitride coatings deposited on SKD11 by unbalanced magnetron sputtering

Materials Letters

Volumn 57, Issue 5-6, 2003, Pages 1202-1209

  Han, S ^a   Lin, J H ^b   Wang, G H ^c   Shih, H C ^b,c  

^a NATIONAL TAICHUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^c NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Chromium nitride; Corrosion; Preferred orientation; Unbalanced magnetron sputtering; Wear

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; CHROMIUM COMPOUNDS; COMPOSITION; CORROSION PROTECTION; HARDNESS; MAGNETRON SPUTTERING; MOLECULAR ORIENTATION; MORPHOLOGY; OXIDATION RESISTANCE; PHYSICAL VAPOR DEPOSITION; STOICHIOMETRY; THIN FILMS; WEAR OF MATERIALS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

UNBALANCED MAGNETRON SPUTTERING;

INORGANIC COATINGS;

EID: 0037214830     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(02)00958-8     Document Type: Article

References (19)

1. Kao A.S., Doerner M.F., Novotny V.J. J. Appl. Phys. 66:1989;5315.
2. Bhusham B. Thin Solid Films. 64:1979;231.
3. Trube J., Yabe H., Aya S., Marumoto K., Matsui Y. J. Vac. Sci. Technol. 11:1993;2990.
4. Han S., Lin J.H., Tsai S.H., Chung S.C., Wang D.Y., Lu F.-H., Shih H.C. Surf. Coat. Technol. 133-134:2000;460.
5. Han S., Lin J.H., Guo X.J., Tsai S.H., Su Y.O., Huang J.H., Lu F.-H., Shih H.C. Thin Solid Films. 377-378:2000;578.
6. Sproul W.D. Surf. Coat. Technol. 86/87:1996;170.
7. Zeng X.T., Zhang S., Hsieh J. Surf. Coat. Technol. 102:1998;108.
8. Window B., Savvides N. J. Vac. Sci. Technol., A. 4(2):1986;196.
9. Wang D.-Y., Lin J.-H., Ho W.Y. Thin Solid Films. 332:1998;295.
10. Arai T., Fujita H., Watanabe M. Thin Solid Films. 154:1987;387.
11. Burnett P.J., Rickerby D.S. Thin Solid Films. 154:1987;403.
12. Yao S.H., Su Y.L. Wear. 212:1997;85.
13. Bhushan B., Theunissen G.S.A.M., Li X. Thin Solid Films. 311:1997;67.
14. He J.L., Lin Y.H., Chen K.C. Wear. 208:1997;36.
15. Wanger C.D. Handbook of X-ray Photoelectron Spectroscopy. Oct. 1992;Physical Electronics Division, Perkin-Elmer.
16. Shih K.K., Dove D.B., Crowe J.R. J. Vac. Sci. Technol., A. 4(3):1996;564.
17. Bull S.J., Rickeby D.S. Surf. Coat. Technol. 43/44:1989;355.
18. Bull S.J. Surf. Coat. Technol. 50:1991;25.
19. Hurkmans T., Lewis D.B., Brooks J.S., Münz W.D. Surf. Coat. Technol. 86-87:1996;192.