Electron spin resonance (ESR) characterization of defects in low-k dielectrics

Proceedings of the IEEE 1999 International Interconnect Technology Conference, IITC 1999

Volumn , Issue , 1999, Pages 50-52

  Moussavi, M ^a   Passemard, G ^b   Maisonobe, J C ^c   Turek, P ^c  

^a CEA LETI   (France)

^b STMICROELECTRONICS   (Italy)

^c UNIVERSITÉ DE STRASBOURG   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CARBON FILMS; DEFECTS; DIELECTRIC FILMS; DIELECTRIC MATERIALS; ELECTRON SPIN RESONANCE SPECTROSCOPY; ELECTROSPINNING; MAGNETIC MOMENTS; SPIN DYNAMICS;

ANNEALING TEMPERATURES; AROMATIC POLYETHERS; QUANTITATIVE DETERMINATIONS; STRUCTURAL MODIFICATIONS; UNPAIRED ELECTRONS;

LOW-K DIELECTRIC;

EID: 84962869991     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.1999.787075     Document Type: Conference Paper

References (3)

1. st International Symposium for Testing and Failure Analysis, OH, USA (1995)
2. VV Afanasev, JMM de Nijs, P Balk, A Stesmans; Delft Univ. Of Techn. Journal of Applied Physics vol 78, no. 11 (1995)
3. th Annual Proceedings. Reliability Physics 1989 IEEE, New York, NY USA