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Volumn 63, Issue 5, 1996, Pages 505-508

Machining of submicron structures on metals and semiconductors by ultrashort UV-laser pulses

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; LASER ABLATION; LASER BEAMS; LASERS; MORPHOLOGY; SEMICONDUCTING SILICON; ULTRAVIOLET RADIATION;

SUBMICRON STRUCTURES; THERMAL DIFFUSION EFFECTS;

MACHINING;

EID: 0030286598 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/BF01571681 Document Type: Article

Times cited : (176)

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