Microwave characterization of thin film BST material using a simple measurement technique

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 2002, Pages 1201-1204

  Jin, Zhang ^a   Tombak, Ali ^b   Maria, Jon Paul ^a   Boyette, Brian ^a   Stauf, Gregory T ^c   Kingon, Angus I ^a   Mortazawi, Amir ^b  

^a North Carolina State University   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

^c ENTEGRIS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM; BARIUM COMPOUNDS; CAPACITORS; ELECTRIC PROPERTIES; ELECTRODES; FERROELECTRIC MATERIALS; FILM GROWTH; MICROWAVES; NATURAL FREQUENCIES; PERMITTIVITY; STRONTIUM; TITANIUM;

BARIUM STRONTIUM TITANATE; FERROELECTRIC FILM; MICROWAVE CHARACTERIZATION; PARALLEL PLATE CAPACITOR;

THIN FILMS;

EID: 0036067855     PISSN: 0149645X     EISSN: None     Source Type: Journal    
DOI: 10.1109/MWSYM.2002.1011868     Document Type: Article

References (9)

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8. RF measurement technique for characterizing thin dielectric films
9. Tunable RF filters using barium strontium titanate based capacitors