Dielectric properties of (Ba,Sr)TiO3 thin film capacitors fabricated on alumina substrates

Materials Research Society Symposium - Proceedings

Volumn 748, Issue , 2003, Pages 413-422

  Koutsaroff, I P ^a   Kassam, A ^a   Zelner, M ^a   Woo, P ^a   McNeil, L ^a   Bernacki, T ^a   Cervin Lawry, A ^a   Patel, A ^a  

^a Gennum Corporation   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; CAPACITORS; CRYSTAL STRUCTURE; CURRENT DENSITY; GRAIN SIZE AND SHAPE; LEAKAGE CURRENTS; PERMITTIVITY; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; X RAY POWDER DIFFRACTION;

METAL-ORGANIC DECOMPOSITION (MOD);

THIN FILMS;

EID: 0038713611     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Ezhilvalavan, S., T.-Y. Tseng, Mater. Chem.Phys., 65, 227, (2000).
2. Watt, M.M., P. Woo, T. Rywak, L. McNeil, A. Kassam, ISAF 98, Proc. of the 11th IEEE Inter. Symp. on Applications of Ferroelectrics, 11, (1998).
3. Klee, M., D. Wissen, W. Keur, R. Kiewitt, D. Bausen and P. Lok, Mat. Res. Soc. Symp. Proc., Vol. 655, CC13.1.1-11, (2001).
4. Horwitz, J.S., W.T. Chang, W. Kim, S.B. Qadri, J.M. Pond, S.W. Kirchoefer, D.B. Chrisey J. Electroceram., 4, 357, (2000).
5. Tahan, D.M., A. Safari, L.C. Klein, J. Am. Ceram. Soc., 79, 1593, (1996).
6. Nayak, M., and Tseng T.-Y., Thin Solid Films, 408, 194, (2002).
7. Lee, S.Y., and T.Y. Tseng, Appl. Phys Lett., 80, 1797, (2002).
8. Koutsaroff, I.P., M. Zelner, P. Woo, L. McNeil, M. Buchbinder, A. Cervin-Lawry, Proc. of the 14th Inter. Symp. on Integrated Ferroelectrics, 45, 97 (2002).
9. Sharma, PK, V.V. Varadan, V.K. Varadan, Chem. Mater., 12, 2590, (2000).
10. Koutsaroff, I.P, P. Woo, L. McNeil, M. Zelner, A. Kassam, M. Capanu, L. Chmiel, B. McClelland, and A. Cervin-Lawry, ISAF 2002, Proc. of the 2002 13th IEEE Inter. Symp. on the Applications of Ferroelectrics, (2002), in press.
11. Samantaray, C.B., A. Dhar, M.L. Mukherjee, D. Bhattacharya, and S.K. Ray, Mater. Sci. Eng., B88, 14, (2002).
12. Fujii, E., Uemoto, Y.; Hayashi, S.; Nasu, T.; Shimada, Y.; Matsuda, A.; Kibe, M.; Azuma, M.; Otsuki, T.; Kano, G.; Scott, M.; McMillan, L.D.; Paz de Araujo, C. Electron Devices Meeting (IEDM) Tech. Dig., 267, (1992).