Microwave properties of parallel plate capacitors based on (Ba,Sr)TiO 3 thin films grown on SiO2Al2O3 substrates

Materials Research Society Symposium - Proceedings

Volumn 784, Issue , 2003, Pages 319-325

  Koutsaroff, I P ^a   Bernacki, T ^a   Zelner, M ^a   Cervin Lawry, A ^a   Kassam, A ^a   Woo, P ^a   Woodward, L ^a   Patel, A ^a  

^a Gennum Corporation   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; AMORPHOUS MATERIALS; BARIUM TITANATE; ELECTRIC CONDUCTIVITY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROWAVES; MULTICHIP MODULES; PARAMAGNETIC RESONANCE; PHASE SHIFTERS; SILICA; SUBSTRATES;

ION MILLING; MICROWAVE PROPERTIES; TUNABILITY; VECTOR NETWORK ANALYZER (VNA);

THIN FILMS;

EID: 2942689966     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-784-c5.8     Document Type: Conference Paper

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