Interferometric lithography - From periodic arrays to arbitrary patterns

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 145-148

  Brueck, S R J ^a   Zaidi, S H ^a   Chen, X ^a   Zhang, Z ^a  

^a UNIVERSITY OF NEW MEXICO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; LASER APPLICATIONS; LIGHT; OPTICS;

ARBITRARY PATTERNS; PERIODIC ARRAYS;

LITHOGRAPHY;

EID: 12844282963     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00032-X     Document Type: Article

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