3-Axis surface micromachined ΣΔ accelerometer

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn 40, Issue , 1997, Pages 202-203

  Lemkin, Mark A ^a   Ortiz, Monico A ^a   Wongkomet, Naiyavudhi ^a   Boser, Bernhard E ^a   Smith, James H ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CMOS INTEGRATED CIRCUITS; DEGREES OF FREEDOM (MECHANICS); ELECTROMECHANICAL DEVICES; FEEDBACK; MICROPROCESSOR CHIPS; OPERATIONAL AMPLIFIERS; SENSORS; TIMING CIRCUITS;

AIR GAP CAPACITORS; FORCE FEEDBACK; INPUT COMMON MODE FEEDBACK (ICMF); POSITION SENSE CIRCUITRY;

ACCELEROMETERS;

EID: 0031069462     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)