A high resolution, stictionless, cmos compatible soi accelerometer with a Low noise, Low power, 0.25μM cmos interface

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 572-575

  Amini, Babak Vakili ^a   Pourkamali, Siavash ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ACCELEROMETERS; CAPACITANCE; CMOS INTEGRATED CIRCUITS; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES; MIRRORS; SWITCHING;

BROWNIAN NOISE; ELECTRICAL STIFFNESS; SPRING CONSTANTS; TIME-VARYING ACCELERATION;

SILICON ON INSULATOR TECHNOLOGY;

EID: 3042822186     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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7. T. Veijola, "Model for Gas film damping in a Silicon Accelerometer," Transducers' 97, pp. 1097-1100.