New micromachined membrane switches in silicon technology

IEEE Transactions on Components and Packaging Technologies

Volumn 25, Issue 3, 2002, Pages 397-401

  Hiltmann, Kai ^a   Schumacher, Axel ^a   Guttmann, Kai ^a   Lemp, Engelbert ^a   Sandmaier, Hermann ^a,b   Lang, Walter ^a  

^a Institute for Micromachining and Information Technology   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Contact erosion; Lifetime; Membrane switch; Micromachined; Silicon; Switch

Indexed keywords

BOROSILICATE GLASS; ELECTRIC LOADS; MICROMACHINING; SEMICONDUCTING SILICON; SUBSTRATES;

MEMBRANE SWITCHES;

ELECTRIC SWITCHES;

EID: 0036767973     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAPT.2002.804611     Document Type: Conference Paper

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