|
Volumn 27, Issue 1-3, 2004, Pages 227-230
|
Cathodoluminescence microscopy and spectroscopy of n-type 4H-SiC epilayers
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CATHODOLUMINESCENCE;
CHARGE COUPLED DEVICES;
CONVOLUTION;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
ELECTRON BEAMS;
ELECTRON ENERGY LEVELS;
EPITAXIAL GROWTH;
IMAGE ANALYSIS;
IMPURITIES;
MONOCHROMATORS;
NONDESTRUCTIVE EXAMINATION;
SCANNING ELECTRON MICROSCOPY;
SPECTROMETERS;
STACKING FAULTS;
THERMAL CONDUCTIVITY;
IONOLUMINESCENCE;
OPTICAL METHODS;
OTHER SEMICONDUCTORS;
SILICON CARBIDE;
|
EID: 10244259109
PISSN: 12860042
EISSN: None
Source Type: Journal
DOI: 10.1051/epjap:2004091 Document Type: Conference Paper |
Times cited : (5)
|
References (17)
|